凈化無塵車間參數：
| 潔凈度級別 | 塵埃zui允許數/平方米 | 微生物zui大允許數 | ||
|
| ≥0.5um | ≥5um | 浮游菌個/立方米 | 沉降菌個/皿.30min |
| 100 | 3500 | 0 | 5 | 1 |
| 10000 | 350,000 | 2,000 | 100 | 3 |
| 100000 | 3,500,000 | 20,000 | 500 | 10 |
| 300000 | 10,500,000 | 61,800 | NA | 15 |
■ 基于≥0.5um粒徑的各國潔凈度等級近似對照表 凈化無塵車間
| 個/M3≥0.5um | ISO | US | US | EEC | FRANCE | GERMANY | JAPAN |
| 1 | - | - | - | - | - | - | - |
| 3.5 | 2 | - | - | - | - | 0 | 2 |
| 10.0 | - | M1 | - | - | - | - | - |
| 35.3 | 3 | M1.5 | 1 | - | - | 1 | 3 |
| 100 | - | M2 | - | - | - | - | - |
| 353 | 4 | M2.5 | 10 | - | - | 2 | 4 |
| 1,000 | - | M3 | - | - | - | - | - |
| 3,530 | 5 | M3.5 | 100 | A+B | 4,000 | 3 | 5 |
| 10,000 | - | M4 | - | - | - | - | - |
| 35,300 | 6 | M4.5 | 1,000 | 1,000 | - | 4 | 6 |
| 100,000 | - | M5 | - | - | - | - | - |
| 353,000 | 7 | M5.5 | 10,000 | C | 400,000 | 5 | 7 |
| 1,000,000 | - | M6 | - | - | - | - | - |
| 3,530,000 | 8 | M6.5 | 100,000 | D | 4,000,000 | 6 | 8 |
| 10,000,000 | - | M7 | - | - | - | - | - |
■ 潔凈室及潔凈區空氣中懸浮粒子潔凈度等級
| 空氣潔凈度等級(N) | 大于或等于表中粒徑的zui大濃度限值(pc/m3) | |||||
|
| 0.1um | 0.2um | 0.3um | 0.5um | 1um | 5um |
| 1 | 10 | 2 |
|
|
|
|
| 2 | 100 | 24 | 10 | 4 |
|
|
| 3 | 1000 | 237 | 102 | 35 | 8 |
|
| 4 | 10000 | 2370 | 1020 | 352 | 83 |
|
| 5 | 100000 | 23700 | 10200 | 3520 | 832 | 29 |
| 6 | 1000000 | 237000 | 102000 | 35200 | 8320 | 293 |
| 7 |
|
|
| 352000 | 83200 | 2930 |
| 8 |
|
|
| 3520000 | 832000 | 29300 |
| 9 |
|
|
| 35200000 | 8320000 | 293000 |
